Instrumentation
Quarts meter of films thickness
Quarts meter of film thickness MICRON-5 is successfully used for control of thickness of vacuum sputtered multi-layer film structures.
System of gases control FC-3
Gases control system (GCS) is designed to be used in vacuum process equipment, that require precise control and maintenance gas flows consumption.
Quarts sensors QS/QSM
Quarts sensors QS/QSM are designed for operation in quarts systems of vacuum deposited thin-film thickness control.
Plasma emission sensor (PES)
Sensor is designed for converting intensity of plasma glow at certain wave length into standard electrical signal.
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Customers' references to working.
A.P.Ermolin, Chief Engineer
Central Design Bureau TOCHPRIBOR FSUE
Novosibirsk, Russia
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