Quarts sensors QS/QSM are designed for quarts systems to control thickness of thin films deposited in vacuum. In their operation they use accessory quarts plates-resonators with frequency 4 MHz, 5 MHz or 6 MHz.

Sensors are provided with water cooling system and complete with magnetic protection, fittings, flanges and cooling tubes depending on the field of application.

Application:

•  ion-beam sputtering;
•  magnetron sputtering;
•  electron-beam, thermal evaporation;
•  electron beam evaporation with ion assisting.
•  ultra-high vacuum (UHV);
•  high vacuum (HV).

Specification :

Range of measured frequencies , MHz .............. from 4 to 10

Range of measured film thickness ....... from 1 nm to 3..5 mkm