IZOVAC is happy to present to you quarts meter of films thickness Micron-7. The principle of operation is based on measuring quarts sensor resonance frequency departure depending on material deposited on it. The system allows to measure thickness of vacuum deposited coatings with accuracy up to 1 angstrom.

Purpose:

Control of physical film thickness in the process of thin-film structures sputtering.

Application:

• Deposition of coatings in microelectronics;
• Deposition of coatings in acoustic optoelectronics;
• Control of thin optical coatings, including during reactive deposition (up to 50 nm);
• Control of precious materials deposition (AU, Au:Ge, Ag, etc.).

Merits :

• High resolution. For tangal oxide films resolution of thickness measurement is 1 angstrom.
• Reliability. The instrument has conductive decouplings in supply circuits and insulated signal buses up to 2500 V.
• Integration in systems of technological process control. The instrument generates sputtering termination signal as soon as specified film thickness is reached. Besides, the instrument generates measurement data on serial interface RS-232 and RS-485.
• Wide range of quarts plates. The instrument can operate with resonance plates having resonance frequencies from 4 to 10 MHz.
• Can issue a control signal for 2-curtain head protection quartz
• Small dimensions. The instrument is manufactured in housing of standard MEK297 with height of 3U.
• New control panel