
|
|
Technical characteristics IzoMag MSS (1000õ80õ8) |
|
Max. working power, kW |
8,0 |
|
Power supply type |
DC |
|
Working pressure, Pa(´10 -3 Torr) |
0,5…1
(3,75…7,5) |
|
Number of targets |
1 |
|
Target Dimensions, mm |
1000õ80õ8 |
|
Target mounting method |
clamped |
|
Target cooling type |
direct or indirect, water cooled |
|
Coolant Consumption |
£ 8 l/min, 2..4bar, 18° |
|
Overall dimensions, mm |
1045õ125õ75 |
|
Weight, kg |
25 |
|
Technical characteristics IzoMag MSS (1500õ127õ8) |
|
Max. working power, kW |
10,0 |
|
Power supply type |
DC |
|
Working pressure, Pa(´10 -3 Torr) |
0,5…1
(3,75…7,5) |
|
Number of targets |
1 |
|
Target Dimensions, mm |
1500õ127õ8 |
|
Target mounting method |
clamped or bounded |
|
Target cooling type |
indirect or direct, water cooled |
|
Coolant Consumption |
£ 10 l/min, 2..4bar, 18° |
|
Overall dimensions, mm |
1720õ300õ200 |
|
Weight, kg |
- |
|
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