Print date: 10.09.2010
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Double two-sided magnetrons...



Technical characteristics IzoMag DMSS (R-2) 500 (640õ70õ6)

Max. working power, kW

6,0

Power supply type

AC or DC

Working pressure, Pa(´10 -3 Torr))

0,5…1

(3,75…7,5)

Number of targets

4

Target Dimensions, mm

640´70´6

Target mounting method

clamped target

Target cooling type

indirect, water cooled

Coolant Consumption

<=6 l/min, 2..4bar, 18°

Overall dimensions, mm

900õ460õ140

Weight, kg

60

Technical characteristics IzoMag DMSS (R-2) 1200 (1500õ200õ10)

Max. working power, kW

15,0

Power supply type

AC or DC

Working pressure, Pa(´10 -3 Torr)

0,5…1

(3,75…7,5)

Number of targets

4

Target Dimensions, mm

1500õ200õ10

Target mounting method

clamped or bounded

Target cooling type

indirect or direct, water cooled

Coolant Consumption

 <=15 l/min, 2..4bar, 18°

Overall dimensions, mm

1910õ810õ560

Weight, kg

800


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