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Systems of one-beam control SFKT-751 received wide recognition among process engineers and operators of vacuum coaters. Still, lately level of tasks being solved in control of optical coatings deposition has greatly risen, that demanded updating of existing systems. Series INVISIO-M is new stage of development of coatings’ spectra control methods in the course of sputtering. The use of up-to-date photo detectors in this series allows to monitor the process with greater accuracy and stability.
Application:
- Control of the process of sputtering quarter-wave and non-equally thick coatings
- Monitoring and automatic control of coatings deposition process in vacuum sputtering systems.
Types of coatings being controlled:
- Optical filters
- Spectrum dividers
- Laser coatings
- Mirrors
- IR-coatings
- Other multi-layer optical coatings of UV, visible and near IR ranges.
Merits:
- Extended possibilities at low cost
The system is an update of SFKT-751- standard complete set of vacuum coaters series VU-1A and VU-2M. The update consists of the following:
- replacement of radiation source;
- replacement of power supply units for modern and small-dimension ones;
- automatic control of drives for all accessory parts (diffraction grids, filters, etc.);
- installation of up to three diffraction grids at the same time;
- use of sensitive semiconductor photo detectors;
- use of up-to-date small-noise amplifiers for processing signals of photo detectors;
- use of optical fibers for radiation transmission to monochromator.
The system is equipped with up-to-date photo detectors operating in the range of 200…5000 nm. The system allows to measure coating spectrum in the course of sputtering.
Hugh accuracy and stability of measurements
Correction filters and interference-proof systems of modulated signals processing allow to obtain maximum signal/noise ratio within the whole spectral interval.
Series INVISIO-M can operate as part of common sputtering technological process control system and allows to stop the process after rated parameters of coating spectrum are achieved.
All units of power supply and signal processing are mounted inside monochromator MM101 housing (except UV-lamp power unit). The system is easily and quickly mounted on vacuum coaters.
- Flexibility in selecting spectral range
Wide set of radiation sources and detectors allows to select required spectral range for solution of concrete tasks. Maximum possible range is 200 –5000 nm.
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