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Multi-layer, not –equally-thick optical coatings can now be sputtered with much higher precision and recurrence thanks to the use of spectral optical control system INVISIO-S. The system allows to monitor the change of the whole growing coating spectrum directly in the course of sputtering , and make layer-by-layer coating correction.
Application:
- Control of the process of sputtering quarter-wave and not-equally-thick coatings
- Monitoring and control of coatings deposition process in vacuum sputtering systems.
Types of coatings being controlled:
- Optical filters
- Spectrum dividers
- Laser coatings
- Mirrors
- IR-coatings
- Other multi-layer optical coatings of UV, visible, near IR ranges
Merits:
- Adaptability of system INVISIO-S to any vacuum coaters
The optical system is of modular design and uses optical fibers, which allows to install it in any vacuum coater irrespective of configuration.
High-speed low-noise CMOS-triggers-based spectrometers are used as registration devices. Minimum possible measurement time of the whole spectrum is only two ms. It gives the possibility to have the whole spectral characteristic in the course of coating sputtering process with minimal measurement delay.
It provides high accuracy and stability of measurements, excludes impact of ambient flares on measurement results.
Series INVISIO-S can operate as part of the common sputtering process control system and allows the operator to stop the process after as soon as specified coating spectrum parameters are reached.
All system components are distinguished for their small dimensions and weight, allowing to mount them on small-sized chambers and in hard-to-reach places.
- Flexibility in selecting spectral range
The system design in the form of individual modules allows to select necessary spectral range for solving specific tasks. Maximum possible range is 200-1700 nm.
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