Vacuum system “Clean scanner” is intended for display application. Assembly SE-200 has been developed for obtaining new types of coatings, used in organic displays. These vacuum systems are particularly efficient in deposition of Si₃N₄- based thin-film sealing coatings and transparent conducting coatings with improved characteristics. Easy integration of assemblies SE-300 in new and existing OLED displays’ production lines has been assured by using additional lock chamber, provided with individual high vacuum evacuation system and high-vacuum robot-manipulator

Purpose:

• Deposition of Si₃N₄ and SiO₂-based sealing coatings;
• Deposition of transparent conducting coatings with improved characteristics.

Application:

• OLED displays.

Features:

• Ion-beam sputtering source with four-position unit of replaceable targets provides ample opportunities both for conducting research and production of thin-film structures having various composition and degree of complexity.
• Application of ion -beam technologies from IZOVAC for deposition of coatings directly on organic structures without degradation of their characteristics have been successfully confirmed by our customers.
• Very low level of particles generation in the course of coatings deposition is achieved owing to special design of ion sources movement mechanism, practically having no friction pairs;
• Integration in research and production OLED lines is provided, if necessary, by a lock chamber with high-vacuum robotic loader;
• Dimensions of processed substrates are 200x200 mm and 370x470mm;
• Substrates’ heating can be set optionally;
• Assembly design complies with requirements for clean room of Class 1000.