Izovac

	Wide range of sputtering materials, possibility to obtain multi-layer, super precision coatings in the automatic mode and small dimensions make assembly Plasma Scan 500 your well substantiated choice. Principal fields of application: Production of coatings for flat displays; Sputtering of laser elements; Functional coatings; Production of dielectric filters and mirrors; Research and development. Features : Easy and fast technological process; Complete automation of production processes; Processes of ion substrate cleaning and coatings sputtering are organized in one cycle; Short time of substrate loading/unloading owing to original design of the lock chamber; High uniformity of one- and multi-layer films (± 0.8%); Optical and quarts control; Sputtering on thermally sensitive substrates; Possibility of sputtering of up to four target materials within one sputtering cycle using ion-beam or magnetron sputtering technologies; Recording (archiving) all assembly operation parameters. Examples of deposited coatings: ITO, SiOX, Cr, Al, Al2O3, Nb2O5, Ta2O5, TiO2, CuO2, MgO, SiXNY and so on.