Aurora - D

Substrate dimension

Substrate size: Generation 5

Substrate thickness: 0.33 - 1.1 mm

Coating technology

  • MF cathode
  • Rotary cathode

Sputter material

Si, Nb and many others

Productivity

Flexible carrier tact time starting from 35 sec

Features

  •  Possibility of organic-masking 
  •  Modular design.
  •  Turbo molecular pumps are used.
  •  Single-side or double-side deposition.
  •  Glass substrates are fixed in the transport carriages.
  •  Clean transport system. No contaminating particles are generated.
  •  Each chamber has forward and backward vacuum transport tracks.
  •  Pre-heated substrates are used.
  •  User friendly software.
Product list