Aurora-M

Substrate dimension

Substrate size: Generation 5

Substrate thickness: 0.33 - 1.1 mm

Coating technology

  • DC cathode
  • Rotary cathode

Sputter material

Al, Mo and others

Productivity

Flexible carrier tact time starting from 35 sec

Features

  •  Modular design.
  •  Turbo molecular pumps are used.
  •  Single-side or double-side coating.
  •  Glass substrates are fixed in the transport carriages.
  •  Clean transport system. No contaminating particles are generated.
  •  Pre-heated substrates are used.
  •  User friendly software.
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