Diamanta

The vacuum system is designed for deposition of wear-resistant anti-reflecting DLC (diamond-like-carbon) coatings for the IR-range (within 3-5 µ and 7-14 µ) on Si and Ge substrates (moulds).

Deposition area is 370х420 mm. Deposition method is direct ion beam deposition of carbon.

No

Parameters

Value

1.       

Deposition area, mm

370х420

2.        

Maximum thickness of substrate, mm

35

3.       

Ultimate residual pressure in clean chamber without rigging, mbar

8 х10-6

4.

Time to reach ultimate residual pressure, minutes, max

60

5.

Time to reach working pressure 1 х10-5 mbar in clean chamber starting from high-vacuum pump down, minutes, max

15

6.

Leakage in the chamber within 10 hours, l mbar /s, max

1 х 100

7.

Non-uniformity of coating thickness at any point of

substrate measuring 330 х350 mm2 must not exceed, %

+/-3

8.

Mass, kg, max

2000

9.

Power consumption, kW, max

35

 
Product list