Lidiz

Vacuum technological system LIDIZ is an effective system for deposition of precision optical coatings for a wide range of applications. The LIDIZ vacuum system is equipped with a high-frequency grid ion-beam sputtering source, high-frequency grid ion-beam source for substrates pre-cleaning, surface activation and sputtering assisting and high-frequency neutralizer.

LIDIZ system helps to obtain thin films of from a variety of materials with high accuracy and excellent quality. Spectral optical control allows to make the processes fully automatic and increase the yield significantly. The system is intended both for R&D and small-scale production. The system is implemented with dry pumping system, ensuring high purity of the working processes.

TECHNOLOGICAL FEATURES:

  • High-frequency ion-beam grid sources for the sputtering, pre-cleaning, surface activation and

sputtering assisting

  • Loud-lock chamber with robotic arm
  • Disc or planetary substrate holders
  • Spectral or single wave optical monitoring system from UV to mid-IR range with coating re-optimization during the process
  • Innovative holder for 4 targets per process with a mechanism of rotation and horizontal move during the sputtering
  • Integration into a clean room

 

Size of substrate holder (either disc or a planet), mm

320

Coating thickness uniformity (either per disc or a planet), %

±0.5

Ø30 mm substrates capacity per disc (one planet) , pcs

37

Ultimate vacuum in a clean process chamber, Pa

5•10-4

Technological devices

High-frequency ion-beam grid source for sputtering;

High-frequency ion-beam grid source for pre-cleaning, surface activation and assisting during the sputtering;

High-frequency neutralizer

Coating monitoring

Spectral or single wave optical monitoring system from UV to medium mid-IR range

 

Product list