Ortus 1100

Application:

Izovac'  Ortus family vacuum technological equipment is applied for deposition of optical coatings by electron-beam and ion-assisting technologies.

Main features of vacuum coater Ortus 1100:

·  Short pumping time

·  High performance and productivity

·  High  coating uniformity

Technical characteristics of vacuum deposition equipment Ortus 1100

Parameter

Value

Chamber' diameter, mm

1120

Chamber' height , mm

1135

Ultimate pressure in the clean chamber without a clean snap, not higher than, Pa

5 х10-5

ime to reach ultimate pressure, no more than, min

8

Time to reach pressure of 1 x 10-3 Pa (without heating) in a clean high-vacuum chamber since the beginning of pumping, no more than, min

40

Leakage into the chamber for 10 hours, no more, l*Pa/s

1 х 10-2

Controllable range of operating pressure in the chamber for process gas overlapping , Pa

1 х 10-2 - 4 х 10-2

Controllable range of heating temperature of the working volume of the chamber in the underdome zone armature, оС

50-350

Electron-beam gun, pcs

2

Ion-assisting source, pcs.

2

Smooth (inverter) speed regulation carousel, rpm

5-15

Coating uniformity for the entire spherical surface of the dome-shaped substrate holder sector,  not more than, %

+/-2,5

Coating uniformity for the satellite of the planetary substrate holder, not more than %

+/-1,5

Weight, not more than, kg

2500

 

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