OCP Broadband Spectral control system

OCP Broadband provides extended control opportunities for different measurement modes. It supports such modes as transmittance, reflectance and direct monitor on either stationary or rotatable substrate (test glass).

Primary deposition process monitor mode is direct transmission through substrate placed on rotatable substrate holder. Spectrometer measures real coating spectrum throughout the working range after each revolution of substrate holder. Software algorithm analyzes measured spectrum based on the optical design of required coating and computes breakpoint for each layer. Close integration with various PLC and Deposition Controllers of vacuum equipment makes it possible to realize optical deposition process automatically from the beginning to the end.

 

System software allows to load coating designs from various coating design programs. Software interface is easy to use and provides full automation of deposition processes. Full automation became possible due to in-situ re-engineering of coating thickness based on layer spectral characteristics and pre-loaded refraction index dispersion. This technique allows to minimize occurring errors.

Depending on sputtering methods and vacuum coaters conception it is impossible to eliminate errors at all. Errors accumulation leads to impossibility of optical design realization. Reoptimization procedure allows to neglect negative errors influence on layers thickness by variation of the residual layer thicknesses and allows to be sure in receiving calculated spectrum after deposition process. High spectral resolution allows to obtain real transmission values and smooth bending of sharp parts of the spectrum that ultimately raises thickness evaluation precision by the software.

Spectral subrange, nm

380-1080

1080-1650

220-380

Spectral resolution, nm

0.5

5.0

0.5

Wavelength accuracy, nm

± 0.2

± 1.0

± 0.2

Wavelength Repeatability, nm

± 0.1

± 0.5

± 0.1

Monitor types

Intermittent (Direct): Transmission

Continious (Indirect): Transmission, Reflection, Backside reflection

Detector

CMOS (Hamamatsu)

Light Source

DC-stabilized Quartz Tungsten

Halogen

Deuterium

Software for thin film

design

OptiLayer, IzoSpectra, FilmStar,

MS Excel, Essential Macleod,

Data transfer

OPC UA

Modbus TCP/IP

Other by request

Test Glass Changer

8 position test glass changer integrated with 4 position cooled

quartz crystal changer

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