OCP Singlewave Monochromatic system

High speed digitizing of the measured data allows to obtain a stable signal even at the minimum measurement times, which makes it possible to monitor the process in equipment with high-speed linear motion of the test glass. Operation with baseline signal calibration avoids any signal changes, not directly connected with the film deposition process on the surface of the object under control. The developed mathematical algorithm allows to approximate measured data with insignificant errors. That makes possible to find stop layer point with hundred of a percent accuracy and send a layer stop signal to the vacuum equipment. This precision allows to carry out deposition process from the beginning to the end automatically. A wide range of options allows you to configure OCP Singlewave to satisfy all the requirements of the process are working on.

Spectral subrange, nm

200-380

380-1100

1100-1650

1650-2500

Spectral resolution, nm

0.8

0.8

1.6

3.2

Wavelength accuracy, nm

±0.2

±0.2

±0.4

±0.8

Wavelength repeatability, nm

±0.1

±0.1

±0.2

±0.4

Monitor types

Intermittent (Direct): Transmission

Continuous (Indirect by test glass): Transmission, Reflection, Backside Reflection

Baseline Stability, %

±0.1%/hour

±0.1%/hour

±0.25%/h

±0.75%/h

Dark Noise, %

±0.01@550nm

±0.01@550nm

±0.01@1550nm

±1@2100nm

Stray light, %

0.3@250nm

0.05@550nm

0.1@1550nm

1@2100nm

Built-in PC

Yes

Light Source

Deuterium lamp

Halogen lamp

(DC-controlled power supply)

Detector

Si

Si

IGA

IGA

Software for thin film

design

OptiLayer, IzoSpectra, FilmStar,

MS Excel, Essential Macleod,

Data transfer

OPC UA, Modbus TCP/IP

Other by request

Test glass changer

8 positions test glass changer integrated with 4 position cooled quartz crystal changer

OCP support the most popular software for optical design creation as Essential Macleod, OptiLayer, TFCalc as well as MS Excel and Text files. Created optical design is uploaded to OCP where it is possible to see coting structure layer by layer. User friendly interface of OCP software provides all visual information to operate process in automatic or manual mode.

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