DIAMANTA vacuum system is intended for deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. DLC coatings are antireflective as well in IR range in 3-5 µm and 7-14 µm. The method of deposition is chemical deposition of carbon from the gas phase stimulated by plasma of an ion-beam source. IR optic products often uses in the most extreme operating conditions, where an AR coating is used in combination with a DLC coating on the front side of external lenses.
To be used in:
- Night vision devices
- Thermal imagers
- Sensors
- Pyrometers
- Optical systems for objectives
- R&D
FEATURES :
- Unique IZOVAC method of DLC coatings deposition
- Load-lock vacuum chamber
- Single wave optical monitoring system
- Can be customized
TECHNOLOGICAL DEVICES:
- Ion-beam sputtering source
- Ion-beam cleaning source
| Maximum substrate size | 370х420 mm |
| Maximum coating thickness uniformity | ± 3,0% |
| Maximum quantity of substrates of 30 mm diameter per one run |
116 pcs |
| Ultimate residual pressure in the clean technological vacuum chamber |
5х10-4 Pа |
| Coatings control | Single wave optical monitoring system |