Plasma Assisted Reactive Magnetron Sputtering (PARMS) system
Vacuum system Meridian is an effective system for high-rate deposition of high-precision optical coatings for a wide range of applications. Meridian system helps to obtain thin films of a variety of materials with high accuracy and excellent quality. Optical control allows to make the processes fully automatic and increase the yield significantly.
Key benefits:
- Long throw sputtering configuration enabling particle free coating processes
- Sputter-Up configuration
- High-yield dual-magnetron AC sputtering systems
- Long life RF plasma sources for precleaning and assisting
- On-substrate direct Optical control system I-Photonics OCP
- Double rotation planetary substrate holder allows mounting of different substrate sizes (200, 250 and 300mm)
Applications:
- Ultra narrow band pass filters
- Multizone filters
- Steep-edge filters
- Single- and multi-notch filters
- Laser mirrors
- Thin-film polarizers
- Beam splitters
Technical data
| Sputtering source | HY planar circular magnetrons |
| Assisting source | RF plasma source Copra DN250 CCR |
| Capacity | Dual rotation planetary holder 10 x 200 mm |
| Coating uniformity | <+/-0.2% |
| Sputtering materials | Ta2O5, SiO2, HfO2, Al2O3, Nb2O5 |
| Coating rate | Up to 6 A/sec (material dependent) |
| Control system | Automatic optical control system I-Photonics OCP |
| Process temperature | <250 oC |
| Pumping system | Dry mechanical pump Turbomolecular pumps |
| Ultimate pressure | 8e-4 Pa |
| Time to reach start process | 45 min |
| Installation area (LxWxH) | 3790x3560x2450 mm |
| Equipment weight | 3400 kg |
