ORTUS-1100

Golden mean of all ORTUS coaters family for production companies with middle cappality.
Siutable for coating on 3D shape substrates

For coatings examples and deatil information about ORTUS please download the ORTUS CATALOGUE.

Configuration options.

1. Substrate holder

  size loading cap. of 1"
for reff.
Thickness U% for all loading area Max single substrate size
Dome type ø995 mm 576 ±2% 380 mm
Planetary 4 x ø387 mm 416 ±1% 387 mm

2. Technological devices

     - Electron Beam Evaporation (EBE)
          3 different sizes EV M-6, EV M-8, EV M-10
          Customized crucibles, 1 ... 12 pockets
          Max. quantity : 2 pcs

     - Cleaning and Assistance sources

          Luch: Accelerator with anode Layer (Ion Current Dencity up to 4.2 mA/cm^2)
          Copra: RF ion source (Ion Current Dencity up to 2.5 mA/cm^2)
          Max. quantity : 1 pcs

     -Resistance evaporation source
          Max. quantity : 2 pcs together with 2 EBE

3. Coating process control

     - Rate and thickness control system (quartz control)

     - Optical process control system IZOVAC OCP
          OCP Broad Band for spectral control
          OCP Single Wave for monochromatic control

4. Accessories

     Substrate heating system
          - IR lamps
          - Tubular heater

Exampes of substrate holders for semispherical substrates

 

 

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