The most compact IBAD coater provides all flexibility of ORTUS platform with options in technologycal devices, substrate holders, process control and accessories.
With dome diameter of 620 mm and possibility to install other substrate holders it is optimized for R&D and small scale production.
For detailed information about our ORTUS IAD coater portfolio and its coating capabilities please download the ORTUS CATALOGUE.
Configuration options:
1. Substrate holder
| size | loading cap. of 1" for reff. |
Thickness U% for all loading area | Max single substrate size | |
| Dome type | ø620 mm | 228 | ±1.5% | 220 mm |
| Planetary | 3 x ø250 mm | 132 | ±1% | 250 mm |
2. Technological devices
- Electron Beam Evaporation (EBE)
3 different sizes EV M-6, EV M-8, EV M-10
Customized crucibles, 1 ... 12 pockets
Max. quantity : 2 pcs
- Cleaning and Assistance sources
Strelok-3 : End-Hall ion source with Ion Current Density up to 1 mA/cm^2
Luch: Accelerator with anode Layer (Ion Current Density up to 4.2 mA/cm^2)
Copra: RF ion source (Ion Current Density up to 2.5 mA/cm^2)
Max. quantity : 1 pcs
- Resistance evaporation source
Max. quantity : 1 pcs together with 2 EBE
3. Coating process control
- Rate and thickness control system (quartz control)
- Optical process control system OCP
OCP Broad Band for spectral control
OCP Single Wave for monochromatic control
4. Accessories
Substrate heating system
- IR lamps
- Tubular heater
