Ion Beam Assisted Deposition (IBAD)

Ion Beam Assisted Deposition (IBAD or IAD) is a technology that combines ion/plasma treatment with electron beam evaporation (or other PVD methode) to modify film growing dinamics and to get desired film properies which impossible to get by convensial PVD methodes. It is used to deposit optical coatings with high densities, conformal coatings on complex surfaces, hard coatings of compound materials, adherent metal coatings, .

The principal advantage of IBAD is that it has many independent processing parametrs as tools to modify thin film and to get required morphology, density, internal stress, crystalinity and chemical composition.
Advantages of films coated by IBAD:
   - higher density (important for optical coatings )
   - improved step coverage (conformality)
   - stable optical constants
   - lower scatering
   - defects free
   - significantly improved adhesion
   - absence of moisture-induced shift (environmental stability )
   - improved durability
   - lower stress

IBAD technology has lower process temperature that open the posibility to make coating on thermal sensitive substrates (PC, PMMA, PET).

IBAD has been widely used in industry due to its middle position in terms of cost/performance between e-beam evaporation (lower film qualityand lower cost) and Ion beam Sputtering (high quality films but low throughput with high cost).

IZOVAC develops IBAD technology from 2002 and realized it in ORTUS Family which is powefull production tool with it modular design and presize Process Control technology

ORTUS platform

IBAD coaters from 700 to 1500 mm chamber size with e-beam evaporation, thermal evaporation and ion/plasma assistance technology and various substrate holders for flat and 3D substrates

 

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