The rapid development of the flat panel display (FPD) industry and then the touch industry in the 2000s and 2010s led to the need to increase production productivity while reducing costs. At the same time, special attention was paid to the stability of the deposition process, ease of maintenance and possibility to work with substrates of diagonal size up to 65+".
The solution was found in continiouse vacuum coating systems called INLINE. In most case magnetron based coating systems are designed to work without interraption with predifined cycle time as a conveyor during several weeks that alowed to increase the degree of automation and improve all production parameters.
INLINE coaters for FPD and touch are classified by substrate (or coating area) size from Gen 1 with coating area 270x360 mm to Gen 10.5 with coating area 2940x3370 mm.
Different substrate types and special requirements to coating process formed tree basic designes of INLINE coater depending on substrate orientation:
IZOVAC starts to work in mass production market in 2008 when deliver his first INLINE coater of Gen 4 for dielectrical layers coating for touch industry.
Today we offer AURORA platform that combine vertical and incline solution from Gen 4 to Gen 8 and ASTRA platform of horizontal inline coaters from Gen 2 to Gen 4.5
IZOVAC INLINE coaters have modular design and can be equiped with AC or DC magnetron sputtering stations with cylindrycal or planar cathodes for the following types of coating:
- ITO and Index Match ITO (or other TCO)
- Anti reflection coating (AR)
- AR +AF (anti finger print coating)
- NCVM color coating
Our coaters can be equiped with AF system for hydrophobic coatings. It is combined with AR coating in one vacuume cycle to reach outstanding quality.
|INLINE vertical modular multifunction coating platform||INLINE horizontal modular multifunction coating platform|